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  • Rapid Thermal Processing

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  • Microwave RTP of SiC

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  • Microwave RTP of GaN

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  • Product

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  • Microelectronics Bonding

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  • Demo: A video of RTP

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News

September 30, 2007
LT Technologies and Rensselaer Polytechnic Institute jointly received a NSF SBIR Phase IIR Grant of $200,000. The grant was awarded to fund

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Technical Publications

- Journal of Electronic Materials, 2006, "Comparison of solid-state microwave annealing"
- Journal of Applied Physics, 2006, "Low sheet resistance aluminum"

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Our Partners

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